A 14 μHz/√Hz Resolution and 32 μHz Bias Instability MEMS Quartz Resonant Accelerometer with a Low-Noise Oscillating Readout Circuit

Engineering, Mechanical Engineering, Electrical Engineering, Information Science, Electronic Information,
MEMS accelerometer   quartz resonator   low-noise circuit   high resolution   phase noise   oscillating readout circuit   bias instability  

A Study on High-Resolution MEMS Quartz Resonant Accelerometer with a Low-Noise Oscillating Readout Circuit Academic Background Microelectromechanical system (MEMS) accelerometers have a wide range of applications in fields such as inertial navigation, seismic detection, wearable devices, and intelligent robots. Particularly in applications like sat...