Study on the Piezoresistivity of Cr-Doped V2O3 Thin Film for MEMS Sensor Applications

Engineering, Mechanical Engineering, Electrical Engineering, Materials Science, Metallic Materials, Inorganic Non-Metallic Materials, Information Science, Semiconductors and Information Devices,
piezoresistive effect   MEMS sensors   Cr-doped V2O3 thin film   strain engineering   metal-insulator transition  

Study on the Piezoresistivity of Cr-Doped V₂O₃ Thin Film for MEMS Sensor Applications Academic Background Piezoresistive microelectromechanical systems (MEMS) sensors are devices that utilize the piezoresistive effect of a material to convert stress changes, induced by the physical property being observed, into resistance changes. These sensors, su...